Accelerators Inc., was one of the
first companies to develop a commercially available ion
implanter for production of semiconductor implantation.
they shipped their first accelerator, the IMPLANTER
l, to Hughes in Newport Beach, CA.
released a 200-Kev system, the IMPLANTER ll.
first production system with a carousel end station, the
1974, the first MOS
system dedicated to low energy implants was released,
1975, released the first
3" wafer, automated cassette-to-cassette system, MODEL
1976, released the first
4" (100mm) automated wafer handling system, MODEL
1977, released the most
popular system ever developed. The first time cryopumps were
used for the vacuum system to produce a contamination free
vacuum. Simple operation, low maintenance, maximum uptime and
a small footprint modular design soon became the industry
standard. The MODEL AIM 210.
Factory Location: 212 Industrial
Blvd., Circle S Dr., Austin TX
Accelerators Inc., other companies involved with
laboratory-type accelerators were:
Hughes, 20% shareholder
of Accelerators Inc. stock
Extrion Corp., began
production equipment in 1971. A start-up company formed by
employees of High Voltage Engineering.
7401 Circle S Road, Austin, TX (Now
212 Industrial Blvd.,
Austin, TX (Now Austin Tool & Baker Distributing
Headway Circle #1A, Austin, TX (Now the home of